Ablation Plasma Ion Implantation:
A New Technique for Implantation of Metal Ions
Principal Researchers:
Ronald M. Gilgenbach, Yue Ying Lau, Michael Jones
Related Papers:
Ablation plasma ion implantation experiments:
Measurement of Fe implantation into Si

Ronald M. Gilgenbach, Yue Ying Lau, Michael Jones
Related Papers:
Ablation plasma ion implantation experiments:
Measurement of Fe implantation into Si
Professors Ron Gilgenbach, Y.Y. Lau and their graduate student Bo Qi
have developed a new technique for direct implantation of metal ions
into substrate materials. This technique, Ablation Plasma Ion
Implantation (APII), utilizes metal ions that are ablated by an excimer
laser from a solid target. The advantage of this technique over
existing plasma immersed ion implantation (PIII) methods is that it
eliminates toxic gaseous precursors, that are required for metal ions.
Ions can be generated from any solid material, even those that are
extremely difficult to vaporize and ionize by conventional methods. It
is hoped that this technique could lead to new, hardened coatings for
automotive applications or be utilized in the semiconductor processing
industry. This research is funded by the National Science Foundation
and includes collaborators from Timken Research. Experimental results
appear in the June 2001 issue of
Applied Physics Letters.




